Contamination-free manufacturing for semiconductors and other precision products
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Contamination-free manufacturing for semiconductors and other precision products

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Published by Marcel Dekker in New York .
Written in English

Subjects:

  • Semiconductors -- Design and construction,
  • Semiconductors -- Defects

Book details:

Edition Notes

Includes bibliographical references and index

Statementedited by Robert P. Donovan
ContributionsDonovan, R. P
Classifications
LC ClassificationsTK7871.85 .C6175 2001
The Physical Object
Paginationx, 448 p. :
Number of Pages448
ID Numbers
Open LibraryOL17011111M
ISBN 100824703804
LC Control Number2001028403

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  Summarizing up-to-date control practices in the industry, Contamination-Free Manufacturing for Semiconductors and Other Precision Products: Details the physics and chemistry behind the mechanisms leading to contamination-induced failures ; Considers particles and molecular contaminants, including the entire spectrum of mass-based  › Books › Engineering & Transportation › Engineering. Contamination-Free Manufacturing for Semiconductors and Other Precision Products ISBN: This book is printed on acid-free paper. Headquarters Marcel Dekker, Inc. Get this from a library! Contamination-free manufacturing for semiconductors and other precision products. [R P Donovan;] Contamination-free Manufacturing for Semiconductors and Other Precision Products Contamination-free Manufacturing for Semiconductors and Other Precision Products Edited by Robert Donovan, L&M Technologies, Inc., NMMarcel Sekker, Inc., NYISBN: 0 + x pages, figures, 56 tables, chapter references, bibliography references

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